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Deformable mirrors (DM) are mirrors whose surface can be deformed, in order to achieve wavefront control and correction of optical aberrations. Deformable mirrors are used in combination with wavefront sensors and real-time control systems in adaptive optics. In 2006 they found a new use in femtosecond pulse shaping.

Catadioptric projection objective with adaptive mirror and projection exposure method

InactiveUS7112772B2Improve image qualityPhotometry using reference valueMirrorsDeformable mirrorAstigmatism

A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are matched to given image errors and their correction. The invention is suitable for astigmatism, fourfold wavefront-deformations due to lens heating, compaction, and the like.

Catadioptric projection objective with adaptive mirror and projection exposure method

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Owner:CARL ZEISS SMT GMBH

1 results about "Deformable mirror" patented technology

Catadioptric projection objective with adaptive mirror and projection exposure method

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