Three-axis acceleration sensor

[0010] The specific embodiments of the three-axis acceleration sensor provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0011] attached figure 1 Shown is a schematic structural diagram of the three-axis acceleration sensor according to this specific embodiment, including: an outer frame 10 fixed on the substrate, and at least one anchor point 11 fixed on the substrate; parallel to the surface of the substrate and perpendicular to each other The two opposite directions are defined as the X direction and the Y direction, the plane where they are located is the XY plane, and the direction perpendicular to the XY plane is the Z direction. In this specific implementation manner, four anchor points are used as an example for description, and the four anchor points are symmetrically arranged at the center O of the triaxial acceleration sensor, and are connected to each other by beams.

[0012] The first movable mass 121 i