1 results about "Turbomolecular pump" patented technology

The invention provides a leakage hole's leakage rate measuring apparatus which belongs to the leakage detection technology field. Through the introduction of a reference chamber completely identical to a measuring chamber with regard to the size, the materials and the processing method, it is possible to reduce the influence of background air deflation and environment temperature change on the measurement accuracy. The device is an all-metal vacuum system, comprising an all-metal valve and vacuum components such as the metal bellows. The completely metallic vacuum system is capable of reducing the errors caused by the permeation of small molecule gas so as to achieve the purpose of accurately measuring the leakage hole's leakage rate. Through the utilization of the apparatus, it is possible to realize the accurate measurement of a leakage hole's leakage rate. The leakage hole's leakage rate measuring apparatus comprises a pumping unit composed of a diaphragm pump and turbo molecular pump, an all-metal angle valve and a plug valve, an air cylinder, a flow meter, an absolute vacuum gauge, a pressure stabilizing chamber, a measuring chamber, a reference chamber, a leakage hole's leakage rate measurement unit, and a differential pressure meter. The apparatus can accurately measure the leakage hole's leakage rate and the operation process is simple and can be used for repetitive measurements.