The invention discloses a high-sequential inorganic substance pattern and preparation method thereof, relates to surface patterning, and provides a high-sequential inorganic substance pattern and a preparation method thereof. The surface of a polymer membrane is provided with sequential porous structures which are semi-spherical circular holes evenly distributed on the surface of the polymer membrane. Distilled water is added into a container to make water vapor pressure in the container reach saturation; a polymer, a metal complex and an organic solvent are blended into a mixed solution; the mixed solution is added on a substrate, and then the substrate is put into the container filled with saturated water vapor and sealed; and after the organic solvent is completely volatilized, a porous structural membrane is obtained, and then the porous structural membrane is radiated by ultraviolet light and baked to obtain the inorganic substance pattern. The inorganic substance pattern does not need to use high temperature (over 600 DEG C), and has the characteristics of low cost and no toxicity.