The invention provides a compound-eye light homogenization
system, an optical engine and a
light source optimization device and relates to the technical field of photoetching
direct writing exposure machines and
projection display. According to the compound-eye light homogenization
system provided by the invention, parallel incident light passes through a first lens, a second lens, a third lens and a fourth lens in sequence; first compound-
eye lens arrays are arranged on opposite surfaces of the second lens and the third lens; second compound-
eye lens arrays are arranged on departure surfaces of the first lens and the fourth lens; a focus point of each
small lens in the second compound-
eye lens array of the first lens is overlapped with an optical center of a corresponding
small lens in the first compound-eye
lens array of the second lens; and the focus point of each
small lens in the first compound-eye
lens array of the third lens is overlapped with optical center of the corresponding small lens in the second compound-eye
lens array of the fourth lens. According to the compound-eye light homogenization
system provided by the invention, the problem that
energy distribution is not uniform in a DI
exposure process is solved; effective homogenization of light can be realized; and needed uniform energy can be obtained in the final DI
exposure process.