Fabrication of a phase-change resistor using a backend process

A technology of resistors and resistors, which is applied in the field of manufacturing phase-change resistors using back-end technology, can solve problems such as life cycle or durability limitations of electronic devices, and achieve the effect of saving manufacturing steps

Inactive Publication Date: 2008-04-16
NXP BV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the lifetime (also known as life cycle or durability) of electronic d

Method used

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[0046] The present invention will be described with respect to specific embodiments with reference to specific drawings, but the present invention is not limited thereto but only by the claims. The drawings are only schematically depicted and are non-limiting. In the drawings, the size of some elements may be exaggerated and not drawn to scale for illustrative purposes. The word "comprising" used in the specification and claims does not exclude other elements or steps. The singular form includes the plural, unless specifically indicated that it does not include the plural.

[0047] In any embodiment of the present invention, the resistance element is preferably an elongated resistance element, such as a bar shape. These bars are shown schematically in the drawings. The longitudinal direction of these elongated elements is parallel to the longest dimension.

[0048] Some embodiments are based on the arrangement shown in WO 2004 / 057618, in which the Joule heat at the first contact ar

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Abstract

A phase change resistor device has a phase change material (PCM) for which the phase transition occurs inside the PCM and not at the interface with a contact electrode. For ease of manufacturing the PCM is an elongate line structure ( 210, 215 ) surrounded by the conductive electrode portions ( 200, 240 ) at its lateral sides, and is formed in a CMOS backend process. An alternative is to form the device coupled directly to other circuit parts without the electrodes. In each case, there is a line of PCM which has a constant diameter or cross section, formed with reduced dimensions by using a spacer as a hard mask. The first contact electrode and the second contact electrode are electrically connected by a "one dimensional" layer of the PCM. The contact resistance between the one-dimensional layer of PCM and the first contact electrode at the second contact electrode is lower than the resistance of a central or intervening portion of the line.

Description

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Claims

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Application Information

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Owner NXP BV
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