1 results about "Arc suppression" patented technology

The invention relates to a plasma chamber arc suppression method and device and a radio frequency power supply system. The method comprises the following steps: carrying out arc detection on a plasma chamber; the arc detection comprises reflectivity detection, slope detection and pressure detection; determining whether electric arc is generated in the plasma chamber according to any one of reflectivity detection, slope detection and pressure detection; if the electric arc is generated, performing variable inductance adjustment on an access inductor of a main loop connected in series in the plasma chamber according to the severity of the generation of the electric arc, and suppressing the electric arc in the plasma chamber; according to the variable inductance adjustment mode, the inductance values of the connected inductors are correspondingly adjusted from small to large according to the sequence from light to heavy of the severity degree of electric arc generation. High-reliability detection on whether electric arc is generated in the plasma chamber is realized by adopting a mode of combining multiple detection means, and electric arc suppression is carried out by adopting an inductance changing mode, so that the aim of greatly improving the suppression reliability of the electric arc in the chamber is fulfilled.