1 results about "Gas leak" patented technology

The invention discloses a leak detection device for a semiconductor special gas conveying pipeline, which comprises an outside-pipe clamping mechanism, a sealing cover and a gas detection mechanism, and is characterized in that the gas detection mechanism comprises a flow guide pipe and a balance pipe which are arranged on the outside-pipe clamping mechanism, and a gas detection bottle which is in threaded connection with the outside-pipe clamping mechanism; one end of the flow guide pipe extends to the inner side of the outside-pipe clamping mechanism and is used for collecting leaked special gas, the other end of the flow guide pipe can extend to the inner side of the balance pipe and is used for discharging the collected special gas, and the gas detection bottle is used for visualizing the leaked gas discharged by the flow guide pipe; the device is clamped on the outer side of the gas pipeline and is sealed by the sealing cover, so that an area to be subjected to leak detection on the gas pipeline is sealed in the device, and when gas in the gas pipeline leaks, the leaked gas is sealed in the device and cannot further leak to the outside.