The invention discloses a time-
delay stable
plasma medium-frequency power supply. The time-
delay stable
plasma medium-frequency power supply comprises a three-phase 18
pulse wave controllable rectifying circuit, a
rectifier filter time-
delay starting circuit, a filter
energy storage circuit, an IGBT drive circuit, an LC series resonant circuit, a medium-frequency
transformer, a variable capacitorand an EMC management circuit, wherein the first output end of the three-phase 18
pulse wave controllable rectifying circuit is connected with the input end of the filter
energy storage circuit, the second output end of the three-phase 18
pulse wave controllable rectifying circuit is connected with the input end of the
rectifier filter time-delay starting circuit, the first output end of the filter
energy storage capacitor is connected with the input end of the IGBT drive circuit, the output end of the IGBT drive circuit is connected with the input end of the LC series resonant circuit, and the output end of the LC series resonant circuit is connected with the input end of the medium-frequency
transformer; the input end of the EMC management circuit is connected with the output end of a three-phase
alternating current power supply serving as a power supply, and the first output end of the EMC management circuit is connected with the input end of the three-phase 18 pulse wave controllable rectifying circuit. According to the time-delay stable
plasma medium-frequency power supply, the stability of a time-delay circuit can be improved.