Apparatus for detecting edge defects of double layer substrate and detection method thereof
A double-layer substrate, edge defect technology, applied in measurement devices, optical testing of flaws/defects, material analysis by optical means, etc. The effect of accurate detection results
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[0026] The present invention will now be described in further detail with reference to the drawings. These drawings are all simplified schematic diagrams, which merely illustrate the basic structure of the present invention in a schematic manner, so they only show the structures related to the present invention.
[0027] Such as figure 1 As shown, the device for detecting edge defects of a double-layer substrate provided by an embodiment of the present invention, wherein the double-layer substrate 2 includes a first substrate 201 and a second substrate 202 arranged in parallel therewith, and also includes a detection device 1 and a lighting unit 3 , The detection device 1 is provided on one side of the double-layer substrate 2, and the lighting unit 3 is provided on the other side of the double-layer substrate 2. The detection device 1 includes a first camera unit 101 and a second camera unit 102, and the first camera unit 101 The first centerline of the first camera unit 102 and th
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