Monolithic tri-axis amr sensor and manufacturing method thereof

[0031]The present invention is more particularly described in the following examples that are intended as illustrative only since numerous modifications and variations therein will be apparent to those skilled in the art. Various embodiments of the invention are now described in detail. Referring to the drawings, like numbers indicate like components throughout the views. As used in the description herein and throughout the claims that follow, the meaning of “a”, “an”, and “the” includes plural reference unless the context clearly dictates otherwise. Also, as used in the description herein and throughout the claims that follow, the meaning of “in” includes “in” and “on” unless the context clearly dictates otherwise.

[0032]Embodiments of the present invention are illustrated in detail hereinafter with reference to the accompanying drawings.

[0033]Referring to FIG. 1, an embodiment of the present invention provides a monolithic tri-axis AMR sensor that includes a substrate (not shown), a f