Apparatus and method for selectively exposing photosensitive materials using a spatial light modulator

Inactive Publication Date: 2005-07-05
NITTO DENKO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0023]It is an advantage of the present invention that, because it uses an LCD spatial light modulator as a “mask,” it allows a pattern to be changed quickly, even during exposure operation.
[0024]It is a further advantage of the present invention that it employs reflective means for supplementing the radiant energy available f

Problems solved by technology

It can be expected, however, that some of the same cost and deployment difficulties confronted when using masks in microlithography will also discourage the use of masks with optical film fabrication.
Although transmissive LCD spatial light modulators have been used successfully in a number of projection display apparatus, these devices have inherent disadvantages for high-energy exposure environments.
This is a significant constraint on the amount of light available for each pixel, whether considered in terms of brightness, irradiance, or exposu

Method used

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Example

[0031]The present description is directed in particular to elements forming part of, or cooperating more directly with, apparatus in accordance with the invention. It is to be understood that elements not specifically shown or described may take various forms well known to those skilled in the art.

[0032]For the purposes of this application, the terms “photosensitive” and “photoreactive” are considered to be equivalent. In a preferred embodiment, the system and method of the present invention are directed to exposure of photoreactive materials in optical films used for alignment of LCP layers, however, the system and methods disclosed herein can be more broadly applied to fabrication of optical films overall, wherever a layer of photosensitive material is exposed or irradiated to take advantage of a photoreaction as part of optical film manufacture.

[0033]With respect to optical films, a substrate layer must have sufficient mechanical strength to serve as a support for additional layers.

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Abstract

An exposure apparatus (8) for fabricating optical film (40) by exposing a pattern such as for photoalignment, where the optical film (40) has a photosensitive layer (20) and a substrate (10). The exposure apparatus (8) directs an exposure beam from a light source (1) to a reflective polarization modulation device (88). The modulated exposure beam is then directed onto the photosensitive layer (20) for forming a pattern onto the optical film (40). A reflective surface (50) is disposed to reflect, back through the optical film (40), a portion of the exposure beam transmitted through the optical film (40), in order to obtain a photoreactive response. The source of exposure radiation and the reflective surface (50) are on opposite sides of the optical film (40).

Description

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Claims

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Application Information

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Owner NITTO DENKO CORP
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