3 results about "Numerical aperture" patented technology

The invention discloses a sub-micron scale glass subsurface defect detection device and method. A light source part of the device comprises a super-continuum luminous spectrum light source and a single-mode optical fiber circulator; a reference arm and sample arm part comprises a first collimating lens, a 45-degree cylindrical reflecting mirror, a reference objective, a reference reflecting mirror, a two-dimensional scanning galvanometer, a sample objective and a part to be detected; a detection arm part comprises a second collimating lens, a transmission grating, a focusing lens, a photoelectric detector and a computer. The method comprises the steps that light of a reference arm and light of a sample arm return back to the single-mode optical fiber circulator in the same way, light beams of the two arms encounter, and interference is caused; interfered light beams are subjected to light splitting through the transmission grating and then focused on different pixel elements of the photoelectric detector through the focusing lens, the photoelectric detector inputs collected signals into the computer, the signals are processed, and faultage images of different positions are obtained. According to the sub-micron scale glass subsurface defect detection device and method, the ultra-wide band light source, the high-power aperture imaging objectives and the common light path imaging structure are adopted, and the three-dimensional structure of sub-micron scale glass subsurface cracks is obtained.