The invention discloses a gas mass flow rate controller based on double CPUs, which includes a sensor signal processing module, an A/D converter, a valve control circuit module, a first microprocessor, a second microprocessor and so on. The first microprocessor is used for realizing functions like flow rate detection, flow rate display, fault diagnosis and so on; and the second microprocessor is used for performing PID control arithmetic, the output result is used for controlling an electromagnetic valve, and the second microprocessor is also used for realizing functions like communication and so on. The double CPUs finish different works respectively, therefore, the anti-jamming capability is enhanced, and the arithmetic speed is increased.