High-precision concentration meter and measuring method thereof

A concentration meter, high-precision technology, applied in sequence/logic controller program control, electrical program control, material resistance, etc., to achieve the effect of improving flow direction, improving measurement environment, and reducing the effect of flow rate

Inactive Publication Date: 2015-03-25
冠礼控制科技(上海)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] With the rapid development of the semiconductor industry, the requirements for concentration are becoming more and more stringent. ,

Method used

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Examples

Experimental program
Comparison scheme
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Example Embodiment

[0021] Below in conjunction with accompanying drawing, the present invention will be further described as follows:

[0022] as attached figure 1 As shown, the concentration meter of the present invention includes a PLC controller 1, a concentration meter 2, a concentration meter probe 6, a liquid inlet pipe 7, a liquid outlet pipe 4 and a liquid deceleration tank 3, and the liquid deceleration tank 3 is provided with a liquid buffer chamber 5. The top part of the liquid buffer chamber 5 is connected to the liquid outlet pipe 4 through the liquid outlet, and the bottom part of the liquid buffer chamber 5 is connected to the liquid inlet pipe 7 through the liquid inlet. The liquid buffer chamber 5 is provided with Density meter probe 6 , the densitometer probe 6 is connected to the densitometer 2 , and the densitometer 2 is connected to the PLC controller 1 . The concentration meter 2 is connected to the PLC controller 1 by means of RS232C communication.

[0023] Measurement meth

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PUM

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Abstract

The invention relates to the technical field of semiconductor manufacturing, in particular to a high-precision concentration meter. The high-precision concentration meter comprises a PLC (Programmable Logic Controller) (1), a concentration meter (2), a concentration meter probe (6), a liquid inlet pipe (7), a liquid outlet pipe (4) and a liquid speed reduction tank (3), wherein a liquid buffer chamber (5) is arranged in the liquid speed reduction tank (3); the top end part of the liquid buffer chamber (5) is connected with the liquid outlet pipe (4) through a liquid outlet, and the bottom end part of the liquid buffer chamber (5) is connected with the liquid inlet pipe (7) through a liquid inlet; the concentration meter probe (6) is arranged in the liquid buffer chamber (5) and is connected with the concentration meter (2); the concentration meter (2) is connected with the PLC (1). According to the high-precision concentration meter, the concentration value close to a target concentration can be accurately measured, the influence of small-range temperature change is avoided, the transmission of the result is not interfered by an external signal, and stable high-precision measurement is realized.

Description

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Claims

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Application Information

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Owner 冠礼控制科技(上海)有限公司
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