High-power plasma microwave resonant cavity

A microwave resonant cavity, plasma technology, applied in discharge tubes, electrical components, circuits, etc., can solve the problems of limited input and output power, low deposition rate, fluctuations, etc., to improve processing accuracy and quality parameters, improve Effect of feeding power, increasing deposition rate

Active Publication Date: 2016-01-13
YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK LIMITED COMPANY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing plasma microwave resonator is mainly composed of a resonant cavity shell and a waveguide device connected to it. The main problem of this single resonant cavity structure is that the feed-in and output power are limited, so that the PCVD deposition rate It is difficult to greatly improve the processing efficiency and the following problems occur: 1. Due to the low deposition rate, the PCVD deposition processing efficiency is low, which increases the cost of optical fiber processing, and it is difficult to meet the needs of mass production of optical fibers; 2. During deposition process

Method used

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Example Embodiment

[0017] The present invention will be further described in detail below in conjunction with the drawings.

[0018] The first embodiment of the present invention figure 1 As shown, it includes two symmetrical resonant cavity shells 1 and 2 with coaxial lines A. The resonant cavity shell is a cylindrical resonant cavity shell, and the two coaxial resonant cavity shells are axially spaced Set, the end separation distance D1 is between 3mm~20mm, the center distance D of the two cylindrical resonant cavity shells is 60mm~120mm, usually three-quarters of the microwave wavelength, in the two coaxial resonant cavity shells A waveguide device 4 is installed along the vertical center line on the middle side of the waveguide device. The waveguide device includes a microwave source and a rectangular waveguide. The front end of the rectangular waveguide is connected to the two resonant cavity shells through a two-division power meter 3, and the microwave The source power is equally divided into t

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PUM

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Abstract

The invention relates to a high-power plasma microwave resonant cavity for a PCVD (Plasma Chemistry Vapor Deposition) optical fiber preform machining tool. The resonant cavity comprises resonant cavity shells and a waveguide device connected with the resonant cavity shells, and is characterized in that the resonant cavity is provided with two bilateral symmetric and coaxial resonant cavity shells, wherein the waveguide device is arranged on one side in the middle of the two coaxial resonant cavity shells in the direction perpendicular to the center line, the front end of the waveguide device is connected with the two resonant cavity shells through a binary power meter, the power of a microwave source is divided into two portions by the binary power meter, and the two portions of power are respectively fed into the two coaxial resonant cavity shells. Not only the feed-in power of the resonant cavity can be effectively improved, but also the leakage of microwave can be effectively reduced; two coaxial resonant cavities can produce two plasmas moving longitudinally when a liner tube is machined, thus effectively improving the deposition rate and the deposition efficiency; the fluctuations of deposition glass for the two coaxial resonant cavities in the axial direction can be counteracted to improve the uniformity of a preform and improve the machining precision and the quality parameter of optical fibers; and the resonant cavity is reasonable in setting and simple in structure.

Description

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Claims

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Application Information

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Owner YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK LIMITED COMPANY
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