High-power plasma microwave resonant cavity
A microwave resonant cavity, plasma technology, applied in discharge tubes, electrical components, circuits, etc., can solve the problems of limited input and output power, low deposition rate, fluctuations, etc., to improve processing accuracy and quality parameters, improve Effect of feeding power, increasing deposition rate
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[0017] The present invention will be further described in detail below in conjunction with the drawings.
[0018] The first embodiment of the present invention figure 1 As shown, it includes two symmetrical resonant cavity shells 1 and 2 with coaxial lines A. The resonant cavity shell is a cylindrical resonant cavity shell, and the two coaxial resonant cavity shells are axially spaced Set, the end separation distance D1 is between 3mm~20mm, the center distance D of the two cylindrical resonant cavity shells is 60mm~120mm, usually three-quarters of the microwave wavelength, in the two coaxial resonant cavity shells A waveguide device 4 is installed along the vertical center line on the middle side of the waveguide device. The waveguide device includes a microwave source and a rectangular waveguide. The front end of the rectangular waveguide is connected to the two resonant cavity shells through a two-division power meter 3, and the microwave The source power is equally divided into t
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