Dual-beam parallel inscribing apparatus based on axial chromatic aberration of focusing lens

A technology of focusing lens and axial chromatic aberration, which is applied in the field of lithography, can solve the problems of widespread application obstacles, relative storage and reading speed limitations, etc., and achieve the effects of improved efficiency, less heat, and improved accuracy

Active Publication Date: 2016-02-24
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Multi-layer optical storage technology is an effective way to improve the information storage of optical discs. However, the previou

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  • Dual-beam parallel inscribing apparatus based on axial chromatic aberration of focusing lens
  • Dual-beam parallel inscribing apparatus based on axial chromatic aberration of focusing lens
  • Dual-beam parallel inscribing apparatus based on axial chromatic aberration of focusing lens

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Embodiment Construction

[0030] The present invention will be further described below through the examples and accompanying drawings, but the protection scope of the present invention should not be limited by this.

[0031] first reference figure 1 , it can be seen from the figure that the double-beam parallel writing device based on lens axial chromatic aberration of the present invention includes a first laser 1, a second laser 4, a first 1 / 2 wave plate 2, a second 1 / 2 wave plate 5, a first expansion Beam mirror 3, second beam expander mirror 6, first beam splitter 7, second beam splitter 9, first reflector 8, second reflector 13, third reflector 15, focusing lens 10, triangular prism 12, the first A detector 14 and a second detector 16 . The positional relationship of the above components is as follows:

[0032] Along the direction of the polarized laser light emitted by the first laser 1 are the first 1 / 2 wave plate 2, the first beam expander 3, the first beam splitter 7 and the first reflect

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Abstract

A dual-beam parallel inscribing apparatus based on axial chromatic aberration of a focusing lens comprises a first laser, a second laser, a first 1/2 wave plate, a second 1/2 wave plate, a first beam expander, a second bean expander, a first beam splitter, a second beam splitter, a first reflector, a second reflector, a third reflector, the focusing lens, a triangular prism, a first detector and a second detector. According to the present invention, two beams of light with different wavelengths are coupled into the same beam of light, the axial chromatic aberration is generated by the focusing lens, and the light is focused into different positions in the axial direction, i.e. the positions with different thicknesses on a photoetching material, so that simultaneous photoetching of double axial focuses is implemented. According to the dual-beam parallel inscribing apparatus, simultaneous storage of double beams can be implemented, the storage speed is doubled, the information storage capacity is also improved, and a basis is provided for popularization and application of a multilayer optical storage technology. The dual-beam parallel inscribing apparatus further has a real-time signal reading and inscribing system, thereby ensuring the inscribing accuracy.

Description

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Claims

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Application Information

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Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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