Dual-beam parallel inscribing apparatus based on axial chromatic aberration of focusing lens
A technology of focusing lens and axial chromatic aberration, which is applied in the field of lithography, can solve the problems of widespread application obstacles, relative storage and reading speed limitations, etc., and achieve the effects of improved efficiency, less heat, and improved accuracy
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[0030] The present invention will be further described below through the examples and accompanying drawings, but the protection scope of the present invention should not be limited by this.
[0031] first reference figure 1 , it can be seen from the figure that the double-beam parallel writing device based on lens axial chromatic aberration of the present invention includes a first laser 1, a second laser 4, a first 1 / 2 wave plate 2, a second 1 / 2 wave plate 5, a first expansion Beam mirror 3, second beam expander mirror 6, first beam splitter 7, second beam splitter 9, first reflector 8, second reflector 13, third reflector 15, focusing lens 10, triangular prism 12, the first A detector 14 and a second detector 16 . The positional relationship of the above components is as follows:
[0032] Along the direction of the polarized laser light emitted by the first laser 1 are the first 1 / 2 wave plate 2, the first beam expander 3, the first beam splitter 7 and the first reflect
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