System for detecting film quality variation and method using the same

[0019] Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, like reference designations will be used throughout the drawings to refer to the same or similar parts.

[0020] Referring to FIG. 2, illustrating a system for detecting film quality variation according to one embodiment of the present invention, a vacuum pump line 100 generates pressure during dry etching. A throttle valve 200 moves in response to the pressure of the vacuum pump line 100 and controls the pressure of the vacuum pump line 100. A monometer 300 measures the movement of the throttle valve 200 and outputs movement data indicative of the movement of the throttle valve to a proportional integral derivative (PID) controller 400. The PID controller 400 outputs the feedback information to the throttle valve 200. the throttle valve 200 controls the pressure of the vacuum pump line 100 based on the feedback