2 results about "Anchor point" patented technology

The invention belongs to the field of positioning navigation time (PNT), and particularly relates to an integrated micro PNT unit comprising a central micro clock module and an outer micro inertia module, wherein an anchor point of the central micro clock module is located at the center, a plurality of circles are distributed outside the anchor point, radial short beams are uniformly distributed between the circles, and outer electrodes are distributed at the outermost periphery. During operation, stable control is realized by electrostatic force action and closed-loop feedback, and stable frequency information is provided externally; the annular anchor point of the micro inertia module is located at the center, the circles are located on the outer side, the composite beams are evenly distributed between the circles and the annular anchor point, the inner and outer sides of the circles are evenly distributed with plane outer electrodes and plane inner electrodes, and the upper and lower surfaces of the circles are distributed with off-plane electrodes, thereby realizing the sensitivity of X, Y, Z three-axis acceleration input and X, Y, Z three-axis angular motion input. The integrated micro PNT unit can be realized by the MEMS planar process as a whole without involving multi-layer stacking and precision assembly on a microscopic level, and the process is relatively simple.