2 results about "Photosensitizer" patented technology

Disclosed is a method of making polysiloxane and polysilsesquioxane hardmask layer photo-imageable with a negative tone. The method is based on a photosensitizer and film modifier. The film modifier reduces pore size of the hardmask films for diffusion control. The negative-tone photo-imageable hardmask is especially beneficial for forming trenches and vias on exposure tools of extreme UV and deep UV lithography. Compositions of negative-tone photo-imageable hardmask based on the chemistry of polysiloxane and polysilsesquioxanes are disclosed as well. Further disclosed are processes of using photo-imageable hardmasks to create isolated trenches or vias on semiconductor substrates with or without an intermediate layer.

The invention discloses a targeting probe for photodynamic therapy and a preparation method. The targeting probe includes a synthetic drug-loaded microbubble, a targeting molecule small peptide LHRH (gonadotropin-releasing hormone) connected to it, and a photosensitizer ZnPc (zinc phthalocyanine) wrapped in it. Compared with the traditional photosensitizers, the present invention overcomes the disadvantages of the existing photosensitizers, which are non-targeting, difficult to be enriched to reach an effective concentration, easy to agglomerate, difficult to deliver to the tumor site, and mostly limited to the tumor site in the epidermis or superficial tissue area, providing A targeted multimode probe with ultrasonic signal, photoacoustic signal and fluorescent signal for photodynamic therapy with high targeting, strong tissue penetration, good stability and strong specificity.