A miniature self-powered device based on bridge-type MPEG

The invention provides a miniature self-powered device based on bridge type MPEG, which is characterized in that the device comprises a piezoelectric structure having a silicon base and a frame coupled to the lower part of the piezoelectric structure through a coupling bridge for accommodating an inspection mass; the piezoelectric structure is coupled to the lower part of the piezoelectric structure through a coupling bridge. The piezoelectric structure includes a silicon substrate, an upper electrode and a lower electrode disposed on the silicon substrate, and a piezoelectric film for generating electric energy sandwiched between the upper electrode and the lower electrode. The frame has an open cavity with a predetermined size, and the test mass is located in the open cavity and coupledto the silicon substrate surface through a coupling bridge. The miniature self-energizing device further includes an upper electrode pad and a lower electrode pad connected to the upper electrode andthe lower electrode, respectively, and the upper electrode pad and the lower electrode pad are connected to a lead-out portion of the frame through a thin wire to transfer electric energy to an external device external to the self-energizing device. The miniature self-energizing device further includes an upper electrode pad and a lower electrode pad connected to the upper electrode and the lowerelectrode respectively. As that piezoelectric film generate electric energy in response to mechanical strain and the response of the mass control to vibration frequency are chec, the external vibration is effectively utilized to generate electric energy, and the piezoelectric film has the advantages of simple structure, strong practicability and the like.