Multi-cavity bidirectional piezoelectric pump excited by piezoelectric transducer and pumping method thereof
A piezoelectric transducer and multi-cavity technology, applied to parts of pumping devices for elastic fluids, pumps with flexible working elements, pumps, etc., can solve problems such as small output pressure and flow
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[0082] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0083] Reference attached Figure 1-Figure 12 , The present invention provides a multi-cavity bidirectional piezoelectric pump excited by a piezoelectric transducer. The multi-cavity bidirectional piezoelectric pump is a multi-cavity bidirectional piezoelectric pump excited by a flexural vibration piezoelectric transducer. , Including valve cavity cover plate 1, pump cavity cover plate 2, pump body 3, two valve cavity bending vibration transducers 4, ben
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