Vacuum pump and heating device thereof

A vacuum pump and heating mechanism technology, applied in the direction of electric heating devices, valve heating/cooling devices, valve devices, etc., can solve the problems of difficulty in maintaining the exhaust performance of vacuum pumps and the decline in exhaust efficiency, and achieve the effects of preventing accumulation and prolonging life Effect

Pending Publication Date: 2019-12-27
EDWARDS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] When the operation of the heating mechanism is completely stopped/stopped as described above, the solidification of the sublimation gas tends to occur near the outlet of the exhaust flow path (R2), and the exhaust efficiency decreases due to the accumulation of solidified products (sub

Method used

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Example Embodiment

[0029] Below, refer to the attached Figure one The best mode for carrying out the present invention will be described in detail.

[0030] figure 1 Is a cross-sectional view of the vacuum pump to which the present invention is applied, figure 2 Is a block diagram including the circuit structure of the heating mechanism of the present invention, image 3 and Figure 4 Yes figure 2 The parts layout of the circuit structure shown.

[0031] If refer to figure 1 , The vacuum pump P1 in the figure includes a cylindrical outer casing 1, a rotating body RB arranged in the outer casing 1, a support mechanism that rotatably supports the rotating body RB, and a drive for rotating the rotating body RB mechanism.

[0032] The outer casing 1 has a bottomed cylindrical shape in which a cylindrical pump casing 1A and a bottomed cylindrical pump base 1B are integrally connected with a connecting bolt in the direction of the cylindrical axis. The upper end of the pump casing 1A serves as The suctio

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PUM

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Abstract

Provided are a vacuum pump and a heating device therefor that are suitable for extending the lifetime of a heating means used as a countermeasure to prevent product accumulation in a vacuum pump. Thevacuum pump evacuates gas using rotation of a rotary body and includes an exhaust flow path for evacuating the gas and a heating means (HM) for heating the exhaust flow path. The heating means (HM) isconstituted by connecting a plurality of resistance heating bodies (RE) in parallel with a pair of wiring lines (WL1,WL2). In addition, the heating means (HM) is provided with: a current measurementmeans (101) that measures the sum of the values of currents flowing through the plurality of resistance heating bodies (RE); a determination means (102) that determines malfunction states of the plurality of resistance heating bodies (RE) on the basis of measurement values obtained by the current measurement means (101); and an output means (103) that outputs malfunction states determined by the determination means (102).

Description

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Claims

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Application Information

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Owner EDWARDS JAPAN
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