High-sensitivity surface acoustic wave absolute pressure sensor

A pressure sensor, surface acoustic wave technology, applied in the pressure difference measurement between multiple valves, fluid pressure measurement of elastic deformation gauge, fluid pressure measurement using acoustic method, etc., can solve the problem of complex pressure reference chamber structure, The increase in sensor volume and the difficulty in processing and preparation have achieved good long-term stability, thermal stress suppression, and good process inheritance.

Active Publication Date: 2020-09-04
BEIJING RES INST OF TELEMETRY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patented device includes two technical features - one relates to reducing the sizes of the current devices while maintaining their performance level; another involves simplifying manufacturing processes for these new designs without compromising on accuracy. Additionally, this design ensures stable operation over time by preventing contamination from outside gases such as water vapor or dust particles during use.

Problems solved by technology

This patented technical problem addressed in this patents relates to improves the pressure sense response (PSI) of an ultrasonic surface acoupled pressure sensor that uses a single crystal plate design but also reduces complexity and manufacturing issues associated therewith.

Method used

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  • High-sensitivity surface acoustic wave absolute pressure sensor
  • High-sensitivity surface acoustic wave absolute pressure sensor
  • High-sensitivity surface acoustic wave absolute pressure sensor

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Embodiment

[0041] The pressure-sensitive diaphragm is made of AT-X quartz (Eulerian angle (0°, 54.7°, 0°)) piezoelectric sheet. The surface acoustic wave resonator adopts a single-ended pair resonator structure, which is made of metal Al electrodes, and the output leads are connected to the bus bars. The surface acoustic wave resonator is arranged on the inner surface of the pressure-sensitive diaphragm, at the center of the pressure-sensitive area of ​​the pressure reference cavity, and the size of the surface acoustic wave resonator is 3mm×2mm.

[0042] The intermediate layer is made of insulating material, and the thermal expansion coefficient is similar to that of the pressure-sensitive diaphragm. The cover plate is made of AT-X quartz piezoelectric sheet, and the thermal expansion coefficient is the same as that of the pressure-sensitive diaphragm. The vacuum pressure reference cavity is realized by direct bonding.

[0043] Traditionally, square or circular pressure reference chamber

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Abstract

A high-sensitivity surface acoustic wave absolute pressure sensor comprises: a pressure sensing diaphragm, a surface acoustic wave resonator, a middle layer, a pressure reference cavity and a cover plate, wherein the middle layer, the pressure sensing diaphragm and the cover plate form an integral structure in a direct bonding or indirect bonding mode, and a pressure reference cavity is formed onthe integral structure; the surface acoustic wave resonator is arranged on the inner surface of the pressure sensing diaphragm and located in the center of the pressure sensing area of the pressure reference cavity. The pressure reference cavity is of a rectangular or oval structure, the short side or oval short axis of the rectangular structure is parallel to the propagation direction of surfaceacoustic waves in the surface acoustic wave resonator, the length of the rectangular structure is larger than or equal to that of the surface acoustic wave resonator, and the long side or oval long axis of the rectangular structure is parallel to the acoustic aperture direction in the surface acoustic wave resonator; and bus bars of the surface acoustic wave resonators (2) are connected with output leads. The sensor is high in sensitivity, small in size, simple in processing technology, good in inheritance and good in long-term stability.

Description

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Claims

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Application Information

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Owner BEIJING RES INST OF TELEMETRY
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