213nm ultraviolet light output method and system

[0040] In the following description, for the purpose of illustration rather than limitation, specific details such as specific structures and techniques are set forth in order to provide a thorough understanding of the embodiments provided by the present invention. It will be apparent, however, to one skilled in the art that the invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.

[0041] figure 1 It shows a schematic diagram of the implementation flow of the output method of 213nm ultraviolet light provided by the application, including the following steps, corresponding devices such as figure 2 Shown:

[0042] Step S11: Control the laser to generate 1064nm fundamental frequency laser pulses, and the 1064nm laser pulses pass through the frequency doubling c