GaN-based echo wall laser based on porous DBR, and preparation method and application thereof

A laser and whispering gallery technology, applied in the field of laser light sources, can solve the problems of increasing the difference in refractive index of the vertical interface, small contact area, leakage of support materials, etc., and achieve the effect of low threshold power density, excellent heat dissipation performance, and large contact area

Pending Publication Date: 2021-04-27
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

In order to improve the light confinement ability of GaN-based whispering gallery resonators, there are two main technical approaches: one is to use epitaxy to grow GaN/Al X Ga 1-x N (aluminum gallium nitride) superlattice is used as a Bragg reflector. However, due to the 2.4% lattice mismatch between GaN and AlN (aluminum nitride), epitaxy is relatively difficult, and the problem is more severe at high Al composition. serious
In addition, in order to achieve high reflectivity of the mirror, the low refractive index difference often needs to be compensated by increasing the number of DBR (aluminum nitride) cycles, and the GaN/AlGaN DBR with multiple cycles of epitaxy will further increase the difficulty of epitaxy
In addition, the refr

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  • GaN-based echo wall laser based on porous DBR, and preparation method and application thereof
  • GaN-based echo wall laser based on porous DBR, and preparation method and application thereof
  • GaN-based echo wall laser based on porous DBR, and preparation method and application thereof

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preparation example Construction

[0050] The present invention also discloses a preparation method of the above-mentioned laser, comprising:

[0051] (1) sequentially growing buffer layers, alternately stacked doped layers, n-type doped GaN layers, active layers, electron blocking layers and p-type doped GaN layers on the substrate;

[0052] (2) performing lateral etching on alternately stacked doped layers to form a porous DBR layer;

[0053] (3) a mask plate is set on the top of the device obtained in step (2);

[0054](4) using the mask plate obtained in step (3) as a template to etch the p-type doped GaN layer, the electron blocking layer, the active layer, the n-type doped layer, the porous DBR layer to the buffer layer;

[0055] (5) removing the mask in step (4), and the obtained device is the laser.

[0056] Wherein, the corrosion method described in the step (2) to form the porous DBR layer comprises the use of electrochemical corrosion;

[0057] Wherein, the pattern shape of the mask plate described i

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Abstract

The invention discloses a GaN-based echo wall laser based on a porous DBR, and a preparation method and application thereof. The GaN-based echo wall laser comprises a substrate, a buffer layer, a porous DBR layer, an n-type doped GaN layer, an active layer, an electron blocking layer and ap-type doped GaN layer, wherein the buffer layer is arranged on the substrate, and the periphery of the buffer layer is etched downwards to form a protruding part; the porous DBR layer is arranged on the protruding part and plays a role in limiting a light field; the n-type doped GaN layer is arranged on the porous DBR layer; the active layer is arranged on the n-type doped GaN layer; the electron blocking layer is arranged on the active layer; and the p-type doped GaN layer is arranged on the electron blocking layer. The bottom porous DBR reflector adopted by the invention has a good vertical limiting effect on the light field of the echo wall microcavity, leakage of part of the light field to the direction of the substrate cannot be caused, and the threshold power density of the prepared echo wall laser is relatively low.

Description

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Claims

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Application Information

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Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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