Applicator and method for transferring dispersion liquid

[0012]In order to solve the problems described above, the present invention provides an applicator for allowing a dispersion liquid of which solid microparticles are dispersed to land at a desired position on a substrate by relatively moving a head module and the substrate, including a first and a second circulation tanks placed outside the head module; a buffer tank provided in the head module; a discharge chamber having an inlet connected to the buffer tank; a main line provided between the first and second circulation tanks and the buffer tank; a return line provided between an outlet of the discharge chamber and the first and second circulation tanks; a feed valve provided on the main line for connecting at least one of the first and second circulation tanks to the buffer tank; and a return valve provided on the return line for connecting at least one of the first and second circulation tanks to the head module. The first and second circulation tanks and the buffer tank are hermetically sealed and the pressure of the space above the dispersion liquid placed in each of the tanks can be controlled.

[0025]Gas dissolution into the dispersion liquid and bubble generating are reduced because the dispersion liquid is not contacted with gases having pressures higher than the atmospheric pressure.

[0026]No gas is engulfed into the dispersion liquid by pumping and generating gas can be prevented because no pump is used for transferring the dispersion liquid.

If the dispersion liquid is supplied by pumping, other problems (such as, engulfing of gas and deformation or damage of the spacer) occur.