2 results about "Coaxial antenna" patented technology

The invention relates to a flange for MPCVD cavity connection and an MPCVD device. The flange comprises an upper flange, a lower flange, a shielding strip and a sealing ring; the upper flange is matched with the lower flange for fixing an MPCVD cavity; the lower flange is provided with an annular slot I, the width of the slot I is integer multiples of the half-wavelength of the microwave transmitted in a medium by taking a partition plate as the medium, and the slot I is used for the partition plate to be mounted; a slot II and a slot III are formed in the groove bottom of the slot I in the lower flange; the slot II and the slot III are concentric annular grooves, and the radius of the slot II is smaller than that of the slot III; and the slot II is used for the shielding strip to be mounted, and the slot III is used for the sealing ring to be mounted. The MPCVD device comprises the flange, an upper half cavity, a lower half cavity, the partition plate, a coaxial transmission section, a coaxial antenna and a growth table. According to the flange and the MPCVD device, vacuum sealing and microwave shielding can be achieved, aging of the sealing ring is slowed down, the situation that the sealing ring is burnt by microwave ignition is prevented, the influence of the flange on a microwave field is reduced, and ignition and secondary plasma generation are prevented.