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1 results about "Plasma cleaning" patented technology

Plasma cleaning is the removal of impurities and contaminants from surfaces through the use of an energetic plasma or dielectric barrier discharge (DBD) plasma created from gaseous species. Gases such as argon and oxygen, as well as mixtures such as air and hydrogen/nitrogen are used. The plasma is created by using high frequency voltages (typically kHz to >MHz) to ionise the low pressure gas (typically around 1/1000 atmospheric pressure), although atmospheric pressure plasmas are now also common.

High-entropy alloy film on surface of bore of barrel and preparation method of high-entropy alloy film

ActiveCN114657514AHigh melting pointHigh hardnessVacuum evaporation coatingSputtering coatingSputteringHigh entropy alloys
The invention discloses a high-entropy alloy film on the surface of a barrel inner bore and a preparation method of the high-entropy alloy film. A barrel inner bore base body is sequentially subjected to ultrasonic cleaning and plasma cleaning; a plasma sputtering method is adopted, and a WMoTaNb layer is deposited on the surface of the body tube inner bore base body subjected to plasma cleaning based on a WMoTaNb target; a plasma sputtering method is adopted, and a WMoTaNbSi gradient transition layer is deposited on the WMoTaNb layer on the basis of the WMoTaNb target and the Si target; a plasma sputtering method is adopted, a WMoTaNbSi layer is deposited on the WMoTaNbSi gradient transition layer on the basis of a WMoTaNb target and a Si target, and a high-entropy alloy film is obtained; the high-entropy alloy film is prepared on the surface of the inner bore to replace an original Cr coating, the high-entropy alloy film has the advantages of being high in melting point, low in heat conductivity, high in hardness, resistant to abrasion, good in high-temperature stability and the like, the problems that a traditional electroplating Cr coating is prone to generating thermal stress cracks and the like can be solved, and then the service life of the barrel is prolonged.
Owner:XIAN TECH UNIV
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