The present invention provides a
white light microscopic interference morphology
reconstruction method based on a mixing interference fringe. A Mirau-type
white light interferometry optical
system is employed, a piezoelectric ceramics
mobile station is employed to perform precision control of the vertical scanning movement of an interference objective, and a series of collected
white light microscopy interferograms are stored. The collected interference grey-
scale map is converted to a
light intensity graph, a normalization modulation degree graph corresponding to a single-frame interference image is obtained through the
frequency domain filtering and the
base frequency signal extraction algorithm, and aiming at each independent vertical scanning position, a mixing interference image is obtained through the multiple of the same pixel
point light intensity value and the corresponding modulation degree numerical value. A series of mixing interference images are obtained through vertical scanning, and the height information of each pixel point of a detected object is obtained through searching the mixing interference extreme value and the corresponding scanning displacement thereof to realize the three-dimensional morphology reconstruction of the object. The white light microscopic interference morphology
reconstruction method based on the mixing interference fringe is high in
measurement precision, high in anti-interference capability and simple in
system, and is suitable for three-dimensional morphology detection of the micro-nano structure.