Patents
Literature
Hiro is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Hiro

50results about "Radiation pyrometry" patented technology

Reactor and method of processing a semiconductor substrate

InactiveUSRE37546E1Accurately determineEliminate needThermometer detailsRadiation pyrometryGas syringeEngineering
A reactor for processing a substrate includes a first housing defining a processing chamber and supporting a light source and a second housing rotatably supported in the first housing and adapted to rotatably support the substrate in the processing chamber. A heater for heating the substrate is supported by the first housing and is enclosed in the second housing. The reactor further includes at least one gas injector for injecting at least one gas into the processing chamber onto a discrete area of the substrate and a photon density sensor extending into the first housing for measuring the temperature of the substrate. The photon density sensor is adapted to move between a first position wherein the photon density sensor is directed to the light source and a second position wherein the photon density sensor is positioned for directing toward the substrate. Preferably, the communication cables comprise optical communication cables, for example sapphire or quartz communication cables. A method of processing a semiconductor substrate includes supporting the substrate in a sealed processing chamber. The substrate is rotated and heated in the processing chamber in which at least one reactant gas is injected. A photon density sensor for measuring the temperature of the substrate is positioned in the processing chamber and is first directed to a light, which is provided in the chamber for measuring the incident photon density from the light and then repositioned to direct the photon density sensor to the substrate to measure the reflection of the light off the substrate. The incident photon density is compared to the reflected light to calculate the substrate temperature.
Owner:KOKUSAI SEMICON EQUIP CORP

Extreme ultraviolet light source

InactiveUS20050230645A1Improve efficiencyImprove performanceNanoinformaticsSemiconductor/solid-state device manufacturingAtomic elementLight energy
The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
Owner:CYMER INC

Terahertz wave and far infrared fusion imaging system

InactiveCN109730635AImplement automatic storageRealize online generationRadiation pyrometrySensorsDiseasePhysician attending
The invention discloses a terahertz wave and far infrared fusion imaging system. The system comprises synchronization equipment, a data storage terminal, a data processing module, a report generationmodule and printing equipment, wherein the synchronization equipment comprises a terahertz transmitter and a thermal infrared imager, the terahertz transmitter and the thermal infrared imager are simultaneously controlled to be switched on and switched off through independent buttons, the thermal infrared imager is electrically connected with the data processing module, the data storage terminal is electrically connected with the data processing module, the data processing module is electrically connected with the report generation module, the report generation module is electrically connectedwith the printing equipment, and the printing equipment is electrically connected with the data storage terminal. The system can achieve the automatic diagnosis of the diseases according to the subjective judgment of an attending physician in combination with medical devices, and the obtained diagnosis result is more reliable; the whole detection process achieves the automatic storage of the dataand the online generation of pathological reports, thereby improving the medical diagnosis efficiency.
Owner:HANGZHOU XINHAN PHOTOELECTRIC SCI & TECH

Device and method of infrared imaging for active detection of aero-optical effect and real-time compensation of aero-optical effect

InactiveCN107144354AHigh precisionRadiation pyrometryOriginal dataImage correction
The present invention provides a device and method of infrared imaging for active detection of an aero-optical effect and real-time compensation of an aero-optical effect. A laser / infrared co-aperture device employs a reciprocating-type optical system with a compact structure; the laser and the emission lens of a laser emission device are used at the outer portion of an aero-optical turbulence area to form laser spots; a wavefront photoelectric sensor is configured to receive laser back scattering energy and extract deviation parameters in distortion wavefront; an infrared detector is configured to extract the infrared radiation heat corresponding to target optical waves; and an image correction circuit and a degeneration image compensation method operated on the image correction circuit are configured to receive infrared object original data and aero-optical wavefront distortion deviation parameters and perform single-frame real-time deconvolution operation of the original image data and the deviation parameters to obtain recovered images so as to realize real-time compensation of the aero-optical effect. The scene adaptability is high, and the correction timeliness is high.
Owner:SHANGHAI AEROSPACE CONTROL TECH INST

Unmanned plane device with function of giving alarm against overheating of high-voltage equipment, and application method

InactiveCN105758526ARadiation pyrometryRemote controlled aircraftPower equipmentPower grid
The invention provides an unmanned plane device with a function of giving an alarm against the overheating of high-voltage equipment, and the device comprises an unmanned plane body, an unmanned plane thermosensitive signal temperature-sensing apparatus, a radio signal transmitting system, a ground thermosensitive radio signal receiving system, a control module, and an alarm. In operation, a remote-control unmanned plane is started to rise, and flies in the space above power high-voltage equipment or a high-voltage transmission line in a transformer station for inspection. The remote-control unmanned plane achieves the temperature inspection and monitoring of the power high-voltage equipment and the high-voltage transmission line through a wide-angle infrared thermosensitive lens. A radio signal transmitter enables a thermosensitive radio signal to be transmitted to a ground thermosensitive radio signal, thereby forming a heating image which is used by an operator for observing the power high-voltage equipment in real time. Moreover, the information is transmitted to the control module, and the control module carries out analysis and gives an alarm. Compared with a conventional unmanned plane for the inspection and monitoring of the power equipment, the device has great advantages in guaranteeing the personal safety and operation safety of the power grid.
Owner:SHAOWU POWER SUPPLY COMPANY OF STATE GRID FUJIAN ELECTRIC POWER +5

Hyperspectral sparse unmixing device

ActiveCN109655154ARadiation pyrometryColor/spectral properties measurementsMultiscale geometric analysisEngineering
The invention relates to a hyperspectral sparse unmixing device and belongs to the technical field of hyperspectral unmixing. The device comprises a first box body, an air inlet fan, an air inlet cylinder, a filtering grid plate, a noise reduction assembly, a sponge, a damping cotton and a filtering assembly, wherein one end of the air inlet cylinder is inserted and fixed in the side wall of the first box body, the air inlet fan is arranged between the upper inner wall and the lower inner wall of the air inlet cylinder, the filtering grid plate is vertically arranged between the upper inner wall and the lower inner wall of the air inlet cylinder and is positioned at one end port of the air inlet cylinder. According to the invention, the noise reduction assembly filters redundant waves of the signal in the low-pass filter, and real-time additive noise such as cloud layer, atmosphere and the like in the acquisition process is removed, filtered and quantized, so that the quality of the hyperspectral image is improved, and the extraction precision of the end element generating sparse demixing is improved; the multi-scale geometric analysis is achieved by adopting the optical filteringtechnology through the filtering assembly, the sparse demixing efficiency is greatly improved on the premise of ensuring the reconstruction precision, and the rapid and effective sparse decompositionis achieved.
Owner:CHONGQING TECH & BUSINESS UNIV

Optical device for assessing optical depth in a sample

InactiveUS20100113941A1Large diameterLower requirementRadiation pyrometryPolarisation spectroscopyOptical probingSpectral function
The present invention relates to an optical device for assessing optical depth (D) in a sample (100) illuminated by polarized radiation (20) from a source (10). A first and a second radiation guide have their end portions (3Oa′, 30b′) arranged for capturing reflected radiation (25a, 25b) from the sample. A detector (40) measures a first polarization (P1) and a second polarization (P2) of the reflected radiation (25), and a first and a second intensity (II, 12) of the reflected radiation (25a, 25b) in the first (30a) and the second (30b) radiation guide, respectively. Processing means (60) then calculates a first (f) and a second (g) spectral function, both spectral functions (f, g) being indicative of single scattering events in the sample. The processing means (60) is further arranged to calculate a measure of the correlation (C) between the first (f) and a second (g) spectral function so as to assess whether the single scattering events originate from substantially the same optical depth (D) within the sample. Thus, the causal relation between the first and second spectral functions can be used for assessing whether the single scattering events giving rise to the two spectral functions come from substantially the same optical depth (D) within the sample. The invention is particular advantageous for optically probing an epithelial layer of a patient.
Owner:KONINKLIJKE PHILIPS ELECTRONICS NV

Temperature control device and oscillator

ActiveUS20150130546A1Shorten the temperature stabilization timeReduced Temperature Stability RequirementsRadiation pyrometryThermometers using electric/magnetic elementsUnit operationProcess engineering
A temperature control device includes a temperature detector, a difference operation unit, a controller, a saturation processing circuit unit, a rewritable storage unit, and a conversion unit. The difference operation unit operates a digital value corresponding to a difference value between a detected temperature value and a target temperature. The controller calculates a manipulated variable using the digital value operated by the difference operation unit. The saturation processing circuit unit includes a digital circuit to limit an output value of the controller to a pre-set upper limit value. The rewritable storage unit stores the upper limit value read from a storage area of the rewritable storage unit and input into the saturation processing circuit unit. The conversion unit converts the output value of the saturation processing circuit unit into an analog signal to output the converted value as a control command value to the heater.
Owner:NIHON DEMPA KOGYO CO LTD

Welded joint fatigue limit rapid prediction method based on fatigue damage entropy production rate

The invention discloses a welded joint fatigue limit rapid prediction method based on a fatigue damage entropy production rate. A butt joint test piece is used for carrying out a fatigue test on a PLG-200 high-frequency fatigue testing machine; the temperature rise of the butt joint in the fatigue test process is measured; a butt joint cumulative fatigue damage entropy model is established, a welding joint fatigue limit rapid prediction mathematical model based on a cumulative damage entropy production rate is preliminarily established, an intersection point between two linear fitting functions is obtained, and a welding joint is predicted by using a lifting method to obtain a fatigue limit test value; and the fatigue limit prediction value is compared with the fatigue limit test value toobtain an error value. According to the method, the function relationship between the cumulative fatigue damage entropy production rate and the fatigue limit is established, the turning point of the cumulative fatigue damage entropy production rate along with the change degree of the load level is found, and the turning point is used as the prediction value of the fatigue limit, so that the fatigue limit can be rapidly predicted from the perspective of the fatigue damage entropy production rate.
Owner:DALIAN JIAOTONG UNIVERSITY

Switch cabinet monitoring device and monitoring method thereof

PendingCN113432721ARadiation pyrometrySupervisory desks/panelsPhysicsElectric machinery
A switch cabinet monitoring device provided by the present invention comprises a switch cabinet, a monitoring device and a plurality of detection devices, the plurality of detection devices comprise humidity sensors installed on the outer side wall of a shell and infrared temperature measurement probes located at different positions in the switch cabinet, and the infrared temperature measurement probes are fixed through swing pieces. And the infrared temperature measurement probes are connected with the control module through wireless communication. The monitoring method of the switch cabinet monitoring device comprises the steps that S1, a motor is started firstly, and the output end of the motor drives a main shaft to rotate; s2, the infrared temperature measurement probes collect infrared rays emitted by an electrical apparatus element; s3, the acquired data is sent to a communication module, and the data is processed through a mainboard; and s4, the processed data are displayed through a displayer, and an alarm device gives an alarm when the temperature exceeds the early warning range. The motor drives the main shaft to rotate, and the mounting seat drives the infrared temperature measurement probes to rotate, so that the detection area of the infrared temperature measurement probes is increased, and detection blind spots are reduced.
Owner:扬中海潮电力设备有限公司

Handheld intelligent electrical line temperature patrol device, system and method

The invention discloses a handheld intelligent electrical line temperature patrol device, system and method, and belongs to the technical field of electrical fire monitoring. The device comprises an infrared thermal imaging shooting part for shooting a thermal image of an electrical circuit, the wireless communication part is used for establishing wireless communication connection between the MCUand other equipment outside the temperature patrol device; the display module is used for displaying the electrical circuit thermal image and the alarm information sent by the MCU; wherein the input module is used for inputting data and/or operation control commands to the MCU, the alarm circuit is used for giving an alarm when the temperature of an electrical circuit is higher than an early warning temperature, the power supply is used for supplying power to all parts, and the storage card is used for permanently storing data and the temporary storage part is used for temporarily storing dataand is electrically connected with the MCU at the same time. The temperature patrol device is handheld and portable in structure, low in cost and convenient to maintain, non-professional technicianscan patrol electric fire hazards on site according to a patrol plan, and the patrol management level of building electric line fire hazards is improved.
Owner:沈阳美宝控制有限公司

Improved infrared monitoring sensor

InactiveCN103808411AOvercome the influence of outdoor natural conditionsReliable monitoringRadiation pyrometryPeak valueBackground level
The invention provides an improved infrared monitoring sensor. The improved infrared monitoring sensor comprises a temperature sensitive probe. The output end of the temperature sensitive probe is connected with a preamplifier circuit. The output of the preamplifier circuit is connected with a band-pass filter amplifier circuit. The output of the band-pass filter amplifier circuit is connected with a maximum peak detection circuit, a minimum peak detection circuit and a background level detection circuit. The output of the maximum peak detection circuit and the output of the background level detection circuit are connected with a high level detection circuit. The minimum peak detection circuit and the output of the background level detection circuit are connected with a low level detection circuit. The output of the high level detection circuit and the output of a threshold level given circuit are connected with a high level comparison circuit. The output of the low level detection circuit and the output of the threshold level given circuit are connected with a low level comparison circuit. The output of the high level comparison circuit and the output of the low level comparison circuit are connected with a DSP system. The improved infrared monitoring sensor can overcome the effects of outdoor natural conditions and provides a reliable monitoring mode.
Owner:XIAN JIAOTONG UNIV JINGSHENG SCI & TECH DEV

Broadband spectrum shaping device and calculation type spectrum measuring device

PendingCN114441037AImprove process precisionHigh precisionRadiation pyrometrySpectrum investigationGratingScattering loss
The invention discloses a broadband spectrum shaping device which comprises a plurality of asymmetric Mach-Zehnder interferometers which are connected in series and have different shaping parameters. The asymmetric Mach-Zehnder interferometer is provided with two interference arms with different arm lengths; the shaping parameter is an arm length difference and/or a coupler light splitting coefficient. The invention further discloses a calculation type spectral measurement device. The broadband spectrum shaping device is based on a common waveguide structure, does not need higher process precision like a grating or a photonic crystal device, does not introduce additional scattering loss, is easy to design, does not need higher processing precision, and has larger working bandwidth and higher precision. According to the calculation type spectrum measurement device, the input spectrum can be reconstructed with high precision through single measurement, due to the fact that the broadband spectrum shaping device is adopted, the manufacturing difficulty and the manufacturing cost are greatly reduced, meanwhile, the measurement precision is effectively improved, and the practicability of the calculation type spectrum measurement device is far better than that of an existing calculation type spectrograph.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products