Patents
Literature
Hiro is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Hiro

18 results about "Vacuum chamber" patented technology

A vacuum chamber is a rigid enclosure from which air and other gases are removed by a vacuum pump. This results in a low-pressure environment within the chamber, commonly referred to as a vacuum. A vacuum environment allows researchers to conduct physical experiments or to test mechanical devices which must operate in outer space (for example) or for processes such as vacuum drying or vacuum coating. Chambers are typically made of metals which may or may not shield applied external magnetic fields depending on wall thickness, frequency, resistivity, and permeability of the material used. Only some materials are suitable for vacuum use.

Extreme ultraviolet light source

InactiveUS20050230645A1Improve efficiencyImprove performanceNanoinformaticsSemiconductor/solid-state device manufacturingAtomic elementLight energy
The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
Owner:CYMER INC

Online chip cleaning and drying equipment

ActiveCN102820242ASimple structureIngenious designDrying using combination processesSemiconductor/solid-state device manufacturingEngineeringVacuum chamber
The invention discloses online chip cleaning and drying equipment which comprises an automatic feeding mechanism, a spray type cleaning device, vacuum drying equipment and a positioning table. The vacuum drying equipment comprises a frame; a pair of drying conveying belts which are connected with a cleaning machine, support the two sides of a chip and horizontally move are arranged in the middle of the frame; a push plate which controls and supports the chip to move up and down through mechanical power is arranged on the frame below the part between the drying conveying belts; a first vacuum chamber provided with a vacuum sucker and an infrared heating tube is arranged right over the push plate; a second vacuum chamber which is movably connected with the first vacuum chamber through a connecting rod mechanism and provided with a sealing structure matched with the lower end of the first vacuum chamber is arranged on one side of the first vacuum chamber; and a vacuum adsorption hole corresponding to the chip is formed on one side of the second vacuum chamber corresponding to the first vacuum chamber and provided with the sealing structure. The equipment is simple in structure and skillful in design, automatically picks up chips, performs spray type cleaning and vacuum drying on the chip, dries the chip through thermal power in the vacuum environment, and prevents the chips from being damaged.
Owner:TONGLING TAIYANGDAO AGRI TECH CO LTD

Device for measuring thermoelectric performance in wide temperature range

This invention relates to a device for measuring thermoelectric performance in wide temperature range, which comprises a measuring platform (5); a sealed vacuum chamber (2) with a vacuumizing device, a heater (9) and a liquid nitrogen cavity (7) connected to the lower ends of an inlet pipe (4) and an outlet pipe (6). Wherein. Both upper ends of (4) and (6) are outside of the chamber (2); there is an insulating layer (8) between (5) and (7). This invention can measure property continually.
Owner:ZHEJIANG UNIV

Self rotation device for vacuum cavity

ActiveCN103807119ASolve the sealing problemTroubleshoot spinning crafting issuesSpring motorMachines/enginesGear wheelEngineering
The invention discloses a self rotation device for a vacuum cavity. The self rotation device comprises a rotation tray, a casing and a spiral clockwork spring, an internal and outer inclined tooth gear, a directional rotation fork and a rotating shaft, wherein the internal and outer inclined tooth gear is an annular wheel, internal and external inclined teeth are respectively arranged on the inner and outer side surfaces of the annular wheel, the inclination directions of the internal and external inclined teeth are opposite, the upper end of the rotating shaft is fixedly arranged on the rotation tray, the lower end of the rotating shaft sequentially passes through the internal and external inclined tooth gear, the clockwork spring and a case, the directional rotation fork comprises a plurality of stop parts, the center of the directional rotation fork is fixed onto the rotating shaft, the tail ends of the stop parts are respectively butted with the internal inclined teeth, the internal end of the spiral clockwork spring is fixedly arranged on the rotating shaft, the outer end of the spiral clockwork spring is fixedly arranged on the casing, a plurality of pallets are arranged on the inner side surface of the casing, and the tail ends of the pallets are butted with the external inclined teeth. The self rotation device for the vacuum cavity has the advantages that the structure is simple, and in addition, the rotation smoothness and the airtightness requirement during the rotation can be met.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Vacuum slit valve

ActiveCN106439042ASo as not to damageAchieve Entrainment SealLift valveActuatorVacuum chamber
The invention relates to a vacuum slit valve which comprises a valve body. The valve body is provided with a channel for conveying a strip, and a vacuum accommodating cavity is disposed in the valve body. A valve body assembly and a valve plate assembly are placed in the vacuum accommodating cavity, and an executor connected with the valve plate assembly is arranged outside the valve body assembly. The valve body assembly is provided with a channel for conveying the strip, and the channel arranged on the valve body assembly is communicated with the channel arranged on the valve body, an included angle between the sealing surface of the valve body assembly and the working direction of the strip is 10-45 degrees, and at least one compressible sealing element surrounds a channel outlet of the sealing surface of the valve body assembly. An included angle between the sealing surface of the valve plate assembly and the working direction of the strip is 10-45 degrees, and the sealing surface of the valve plate assembly is provided with compressible sealing elements corresponding to the sealing elements on the sealing surface of the valve body assembly. According to the vacuum slit valve, under the conditions that the strip is not damaged, vacuum sealing of different vacuum chamber parts is achieved.
Owner:XIAORUI VACUUM EQUIP (JIAXING) CO LTD

Automatic spraying device applied to SPE film and achieving method of automatic spraying device

The invention discloses an automatic spraying device applied to an SPE film and an achieving method of the automatic spraying device. The automatic spraying device comprises a case, a guide rail, a catalyst temperature control spraying device, a motor and a PLC control system. The case is provided with a spraying work platform, a vacuum chamber and an equipment box from top to bottom. The spraying work platform is used for containing a film clamp fixing the SPE film, a sintering porous titanium plate is arranged on the platform top of the spraying work platform, and an induction coil is evenly inlaid in the platform top. The equipment box is internally provided with a vacuum pump and a heating device connected with the induction coil. The guide rail is arranged on the side face of the case. The catalyst temperature control spraying device is in sliding connection with the guide rail and is used for spraying a catalyst to the SPE film. The motor is used for controlling the catalyst temperature control spraying device to move along the guide rail. The PLC control system is connected with the catalyst temperature control spraying device, the motor, the heating device and the vacuum pump at the same time. According to the automatic spraying device, the catalytic performance of the catalyst can be guaranteed, meanwhile, film swelling deformation of the SPE film is avoided, the film forming quality is improved, and the requirement for batched manufacturing is met.
Owner:MATERIAL INST OF CHINA ACADEMY OF ENG PHYSICS
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products