Method of manufacturing vitreous silica diffusion reaction furnace tube
A technology of diffusion reaction and manufacturing method, which is applied in manufacturing tools, glass manufacturing equipment, semiconductor/solid-state device manufacturing, etc., and can solve problems such as large dimensional tolerance, large ellipticity, and unevenness
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[0009] A method for manufacturing a transparent quartz diffusion reaction furnace tube. The raw materials are put into the tungsten clamp pot 2 of the continuous melting furnace 1 for melting. The installed capacity of the continuous melting furnace is 190kw. The heating elements are divided into six groups, and the Y-shaped connection method is used to heat the tungsten grid. Assembled for 76 pieces, the diameter of the melted tungsten crucible 2 is φ540mm, the working temperature in the furnace is 2400℃~2500℃, and the height of the high temperature zone above the bottom stop table 5 of the tungsten crucible 2 is L=750mm~850mm. Automatic feeding to ensure that the height of the material layer in the furnace is H=1200mm. The working protective gas is a mixture of nitrogen and argon. The ratio of nitrogen and argon is 1:3. 320mm laser caliper with an accuracy of 0.001mm for pipe diameter and pipe wall measurement.
[0010] The diameter of the forming outlet of the material blockin
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