Method of manufacturing vitreous silica diffusion reaction furnace tube

A technology of diffusion reaction and manufacturing method, which is applied in manufacturing tools, glass manufacturing equipment, semiconductor/solid-state device manufacturing, etc., and can solve problems such as large dimensional tolerance, large ellipticity, and unevenness

Inactive Publication Date: 2007-08-08
江苏宏伟石英科技有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

The existing continuous melting furnace has a small total amount of hot melting, dense product bubbles and gas lines, large dimensional tolerances, cracked and uneven incis

Method used

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  • Method of manufacturing vitreous silica diffusion reaction furnace tube

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Embodiment Construction

[0009] A method for manufacturing a transparent quartz diffusion reaction furnace tube. The raw materials are put into the tungsten clamp pot 2 of the continuous melting furnace 1 for melting. The installed capacity of the continuous melting furnace is 190kw. The heating elements are divided into six groups, and the Y-shaped connection method is used to heat the tungsten grid. Assembled for 76 pieces, the diameter of the melted tungsten crucible 2 is φ540mm, the working temperature in the furnace is 2400℃~2500℃, and the height of the high temperature zone above the bottom stop table 5 of the tungsten crucible 2 is L=750mm~850mm. Automatic feeding to ensure that the height of the material layer in the furnace is H=1200mm. The working protective gas is a mixture of nitrogen and argon. The ratio of nitrogen and argon is 1:3. 320mm laser caliper with an accuracy of 0.001mm for pipe diameter and pipe wall measurement.

[0010] The diameter of the forming outlet of the material blockin

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Abstract

The invention discloses a making method of transparent quartz dispersing reacting furnace pipe, which comprises the following steps: putting raw material into continuous fusing stove to fuse under 2400-2500 deg.c; setting the height of high temperature area in the tungsten copple at 750-850mm; falling raw material automatically; adopting nitrogen and argon gas with rate at 1: 3 as protective gas; drawing through pipe drawing machine continuously; testing pipe diameter and pipe wall through laser with metering path at 0-320mm and precision at 0.001mm; setting the moulding distance between 40mm and 60mm.

Description

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Claims

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Application Information

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Owner 江苏宏伟石英科技有限公司
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