Mould condition excitation both-end fine beam and mould condition shape electrode width determining method thereof

[0014] Specific implementation method

[0015] Such as figure 1 As shown, the present invention modally excites the microbeams fixed at both ends, including elastic microbeams 1, fixed support modules at both ends 2, and modal electrodes 3, wherein one end of the elastic microbeams 1 is fixed on the fixed support modules 2 at both ends. On the surface, the lower surface of the fixed support module 2 at both ends is fixed with the base, the modal electrode 3 is located directly under the elastic microbeam 1, and the modal electrode 3 is fixed on the base.

[0016] Such as figure 2 As shown, take the construction of the first-order modal function as an example. The method for determining the width of the modal shape electrode 3 with microbeams fixed at both ends of the modal excitation includes the following steps:

[0017] a) Determine that the length of the fixed microbeam at both ends is l along the x direction, the width along the z direction is b, and the thickness along the y di