Developing agent for flat-panel display

Inactive Publication Date: 2009-10-28
绵阳艾萨斯电子材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

Problems solved by technology

This patented technical problem addressed by this patent relates to finding better ways to develop photosensitive materials without causing unwanted side effects like dirtiness or contaminating the material being treated due to volatilization from aquapor phase evaporation over time. Existing techniques involve modifying existing chemistry components based upon conventional principles but they can lead to issues related to residue formation and reduced resolution capabilities caused by increased levels of impurities in the resulting films.

Method used

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  • Developing agent for flat-panel display
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  • Developing agent for flat-panel display

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Taking the glass substrate as an example, the glass substrate can be processed as follows according to the conventional method, and the desired image can be obtained on the glass substrate:

[0048] 1) Cleaning and drying;

[0049] 2) Use Freehand software to design graphics, the width of microchannel graphics is designed to be 80um, and laser high-resolution printing masks are used for backup;

[0050] 3) Place the glass substrate in a KW-4A glue spreader, and evenly coat a layer of photoresist with a thickness of 2.3um at a glue spread speed of 3500r / min;

[0051] 4) Dry and cool the coated glass sheet to room temperature for use. Place the mask on a glass slide protected by photoresist, and expose it with a 500W UV light source for 25sec;

[0052] 5) The developer solution composition required for deployment, its specific composition is: a kind of quaternary ammonium base shown in formula I, the weight ratio of trimethylallyl ammonium hydroxide is 5%, the dehydratio

Embodiment 11

[0063] Embodiment 11, preparation trimethyl allyl ammonium hydroxide

[0064] Trimethylallyl ammonium hydroxide used in the foregoing examples is prepared according to the following method:

[0065] In a 3-liter three-necked flask, 271.0 g (2.0 mol) of trimethylallyl ammonium chloride and 1000 ml of methanol were added, and after uniform stirring, a colorless transparent liquid was obtained. Then, gradually add 80 g (2 mol) of solid sodium hydroxide within 30 minutes, and stir at room temperature for 2 hours. Under the protection of nitrogen, it was separated by filtration to obtain solid by-products and mother liquor. Among them, the solid by-product is mainly sodium chloride, and the solid by-product is suspended in 1000ml of methanol, and after adding a small amount of concentrated hydrochloric acid to neutralize it, the precipitated sodium chloride solid is filtered; the mother liquor is trimethylallyl hydroxide The methanol solution of ammonium is 925g in total, the mass p

Embodiment 12

[0066] Embodiment 12, preparation triethylallyl ammonium hydroxide

[0067] Triethylallyl ammonium hydroxide used in the foregoing examples is prepared according to the following method:

[0068] In a 3-liter three-necked flask, 363.0 g (2.0 mol) of triethylallyl ammonium chloride and 1000 ml of methanol were added, and after uniform stirring, a colorless transparent liquid was obtained. Then, gradually add 80 g (2 mol) of solid sodium hydroxide within 30 minutes, and stir at room temperature for 2 hours. Under the protection of nitrogen, it was separated by filtration to obtain solid by-products and mother liquor. Among them, the solid by-product is mainly sodium chloride, and the solid by-product is suspended in 1000ml of methanol, and after adding a small amount of concentrated hydrochloric acid to neutralize it, the precipitated sodium chloride solid is filtered; the mother liquor is triethylallyl hydroxide Methanol solution of ammonium, 1120g in total, mass percentage conc

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Abstract

The invention discloses a developing agent for a flat-panel display, which contains quaternary ammonium alkali shown in general structural formula I, nonionic surfactant and de-ionized water; in the general structural formula I, R is selected from CH3, C2H5 and C3H7. The nonionic surfactant is any one or mixture of any two or more of sorbitan mono-laurate, polyoxyethylene sorbitan mono-laurate and sorbitan mono-oleate. The quaternary ammonium alkali accounts for 0.5 to 15 percent of the total weight of the developing agent, the preferred proportion is 1 to 10 percent, and the more preferred proportion is 2 to 5 percent, the nonionic surfactant accounts for 0.1 to 10 percent of the total weight of the developing agent, the preferred proportion is 0.5 to 5 percent, and the more preferred proportion is 1 to 5 percent, and the balance is the de-ionized water. As for the developing agent, the aqueous solution formed by the quaternary ammonium alkali and the nonionic surfactant has good intersolubility, and the developing agent has the advantages of good developing performance, no residue, wide operation temperature range, little environmental pollution and the like, and has wide application in the developing preparation process of photosensitive resin.

Description

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Claims

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Application Information

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Owner 绵阳艾萨斯电子材料有限公司
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