Crucible and substrate slice for growing and casting monocrystalline silicon

A monocrystalline silicon and crucible technology, which is applied in the field of semiconductor crystalline silicon manufacturing, can solve the problems of large consumption of monocrystalline silicon blocks and high production costs, and achieve the effects of reducing consumption, reducing production costs and simplifying the operation process

Active Publication Date: 2011-01-05
ZHEJIANG UNIV
View PDF3 Cites 20 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patented method allows growing high-quality single crysts from molten materials without adding any extra material or steps that make it difficult to control its quality. By utilizing an improved crucibles made up of special shapes like squares with openings on their edges, these methods are easier to operate while also producing more precise results than traditional methods.

Problems solved by technology

This patents discuss how current methods for producing pure single-crystal silicons (SIC) require expensive equipment such as quartz rods during cooling processes due to their poor yield rates at room temperature. Additionally, there may also be concerns over potential safety hazards associated with these methods when handling them safely after they were produced.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Crucible and substrate slice for growing and casting monocrystalline silicon
  • Crucible and substrate slice for growing and casting monocrystalline silicon
  • Crucible and substrate slice for growing and casting monocrystalline silicon

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Such as image 3 In the crucible 1 shown, the inner wall 2 at the bottom of the crucible 1 is configured as several continuous crown-shaped structures, and the outer wall 3 at the bottom of the crucible 1 is a square structure. The top view of several continuous bucket crown structures is as follows figure 2 As shown, wherein, the cone angle α of each bucket crown structure is 90°-150°, the bottom dimension L is 0-10cm, the bottom height H is 0-10cm, and the distance K between adjacent bucket crown structures is 0-10cm. 10cm.

[0036] Such as image 3 When growing cast monocrystalline silicon in the crucible 1 shown, it is only necessary to place a small amount of monocrystalline silicon block as a seed crystal in the gap at the bottom of the crucible, then add polycrystalline silicon raw material and doping elements, and heat to completely melt the polycrystalline silicon raw material and doping elements 1. The monocrystalline silicon block is partially melted, and th

Embodiment 2

[0038] Such as Figure 7 In the crucible 1 shown, the inner wall 2 at the bottom of the crucible 1 is configured as several continuous cell structures, and the outer wall 3 at the bottom of the crucible 1 is a square structure. The top view of several continuous cell structures is as follows Figure 6 As shown, wherein, the bottom dimension L of each cell-shaped structure is 0-10 cm, the bottom height H is 0-10 cm, and the distance K between adjacent cell-shaped structures is 0-10 cm.

[0039] Such as Figure 7 When growing cast monocrystalline silicon in the crucible 1 shown, it is only necessary to place a small amount of monocrystalline silicon block as a seed crystal in the gap at the bottom of the crucible, then add polycrystalline silicon raw material and doping elements, and heat to completely melt the polycrystalline silicon raw material and doping elements 1. The monocrystalline silicon block is partially melted, and the insulation cover is lifted or cooling water is p

Embodiment 3

[0041] Such as Figure 11 In the crucible 1 shown, the inner wall 2 of the bottom of the crucible 1 is configured as several continuous hemispherical structures, and the outer wall 3 of the bottom of the crucible 1 is a square structure. The top view of several continuous hemispherical structures is as follows Figure 10 As shown, wherein, the bottom dimension L of each hemispherical structure is 0-10cm, and the bottom height H is 0-10cm.

[0042] use as Figure 11 In the shown crucible 1, only a small amount of monocrystalline silicon block needs to be placed in the gap at the bottom of the crucible as a seed crystal, and then polycrystalline silicon raw material and doping elements are put in, heated to completely melt the polycrystalline silicon raw material and doping element, and the monocrystalline silicon block Partially melt, lift the insulation cover or pass cooling water at the bottom of the crucible for heat exchange, and the single crystal silicon block acts as a se

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Cone angleaaaaaaaaaa
Sizeaaaaaaaaaa
Heightaaaaaaaaaa
Login to view more

Abstract

The invention discloses a crucible and a substrate slice for growing and casting monocrystalline silicon, which can effectively reduce the using amount of seed crystal in the process of casting the monocrystalline silicon and have the advantages of simple structure and low cost. The bottom of the crucible is provided with a plurality of continuous hopper-shaped cap-like structures, a plurality of continuous cellular structures or a plurality of continuous hemispherical structures. The external wall of the substrate slice has a square structure, while the inner wall has the plurality of continuous hopper-shaped cap-like structures, the plurality of continuous cellular structures or the plurality of continuous hemispherical structures.

Description

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Owner ZHEJIANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products