Manufacturing method for low-temperature polycrystalline silicon thin film transistor and array substrate
A low-temperature polysilicon, thin film transistor technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as poor contact of the active layer
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[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0045] Embodiments of the present invention provide a method for manufacturing a low-temperature polysilicon thin film transistor and a method for manufacturing an array substrate, which can solve the technical problem of poor contact between a source or a drain and an active layer.
[0046] Specifically, such as figure 1 As shown, the manufacturing method of the low temperature polysilicon thin film transistor comprises the following steps:
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