Long-stroke high-precision piezoelectric displacement platform and driving method thereof

[0039] Specific implementation mode one: combine Figure 1~Figure 9 This embodiment will be described. This implementation mode provides a specific implementation scheme of a long-stroke high-precision piezoelectric displacement stage. The long-stroke high-precision piezoelectric displacement stage consists of a fixed base 1, a driving stator 2, a bearing slider 3, a top cover 4, a guide rail 5, a thread pair 6, stator mounting screws 7, top cover mounting screws 8 and guide rail mounting screws 9 composition.

[0040] The fixed base 1 adopts an "L"-shaped structure, and the fixed base 1 includes a friction plane 1-1, a guide rail threaded mounting hole 1-2 and a fixed base mounting hole 1-3; the end surface of the friction plane 1-1 is coated with For ceramic and glass fiber friction materials, the friction plane 1-1 has a thickness of e , with a height of h made of stainless steel, h The ratio to e is S= h / e , where the value of S should be less than 20; the guide r

[0046] Specific implementation mode two: combination Figure 10~Figure 11 This embodiment will be described. This embodiment provides a long-stroke and high-precision piezoelectric displacement stage realized by a double-stack single-drive foot stator assembly. Its structural composition and connection method are the same as those in the first embodiment, except that the specific structure of the flexible hinge mechanism 2-1 in the driving stator 2 is different.

[0047] The stacked piezoelectric ceramic 2-2 is fixed in the flexible hinge mechanism 2-1 through the adjusting gasket 2-3 and the Kimi screw 2-4; the flexible hinge mechanism 2-1 is provided with a driving foot 2-1 -1, beam 2-1-2, stator mounting hole 2-1-4, Kimi screw mounting hole 2-1-6, rigid straight beam 2-1-8, straight circular hinge Ⅰ 2-1-9, Rigid beam 2-1-10, straight round hinge Ⅱ 2-1-13, straight round hinge Ⅲ 2-1-14, straight round hinge Ⅳ 2-1-15, straight round hinge Ⅴ 2-1- 16 and straight circular hinge

[0048] Specific implementation mode three: combination Figure 12~Figure 13 This embodiment will be described. This embodiment provides a long-stroke high-precision piezoelectric translation stage realized by a double-stack arched stator assembly. Its structural composition and connection method are the same as those in the first embodiment, except that the specific structure of the flexible hinge mechanism 2-1 in the driving stator 2 is different.

[0049] The flexible hinge mechanism 2-1 is provided with a driving foot 2-1-1, a beam 2-1-2, a stator mounting hole 2-1-4, a base screw mounting hole 2-1-6, and an oval hinge II 2 -1-5, elliptical hinge Ⅰ 2-1-11, rigid beam Ⅱ 2-1-20, rigid curved beam Ⅰ 2-1-60, rigid curved beam Ⅱ 2-1-61, rigid curved beam Ⅲ 2- 1-62 and Rigid Curved Beam IV 2-1-63. The driving foot 2-1-1 is located in the middle of the beam 2-1-2, the end of the driving foot 2-1-1 is coated with friction material, and the driving foot 2-1-1 is in line with the fri