Testing platform for purification material for removing multiple AMCs (airborne molecular contaminants)

A test platform and a technology for purifying materials, applied in the direction of analyzing materials, measuring devices, instruments, etc., can solve problems such as poor analysis of chemical photoresist liquid, abnormal wiring welding, and affecting chip line width process, etc., so as to achieve controllable gas generation , good stability

Pending Publication Date: 2019-11-15
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The existence of acidic corrosive gas can cause pollution and corrosion to the surface of hard disks and chips, and cause chemical photoresist liquid to resolve poorly salt particles, resulting in abnormal wiring welding, abnormal component impedance and other consequences
SO2 and NO2 in the lithography room will react with NH3 in the air to form ammonium sulfate and ammonium nitrate, which will adhere to the lens, fog the lens, affect the precision measurement of lithography, and cause deformation of lithography patterns. AMC will also affect the chip The impact of line width process and AMC on product qu

Method used

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  • Testing platform for purification material for removing multiple AMCs (airborne molecular contaminants)
  • Testing platform for purification material for removing multiple AMCs (airborne molecular contaminants)
  • Testing platform for purification material for removing multiple AMCs (airborne molecular contaminants)

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Embodiment Construction

[0025] The technical solution of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, and the described specific embodiments are only for explaining the present invention, and are not intended to limit the present invention.

[0026] figure 1 It is the principle diagram of the system of the present invention, the performance test platform of various gaseous pollutant purification materials of the present invention, a stable loading air source is provided by an air compressor, and the compressed air 1 of the air source is dehumidified by the silica gel desiccant in the drying pipe 2, and the precision air is filtered The device 3 removes particles in the air, activated carbon removes organic matter and acid-base gases in the air, and finally realizes the drying and cleaning of the loaded air source. The air flow is partially bypassed through the two-stage humidification 5, and the humidity is control

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Abstract

The invention discloses a testing platform for a purification material for removing multiple AMCs (airborne molecular contaminants). The testing platform comprises a five-AMC generation system, the generation system adopts a heating method to generate formaldehyde and toluene AMCs, wherein formaldehyde adopts a needle tube liquid inlet mode, toluene adopts a peristaltic pump mode, and sulfur dioxide, ammonia gas and hydrogen sulfide are generated withan air cylinder generation method. The testing platform also comprises a temperature and humidity control system. Humidity conditions required for testing of the purification material are controlled with a cylinder humidification method, and air conditioning supplies wind to maintain the testing temperature at the normal temperature of 23 plus/minus 2 DEG C. Thetesting platform is mainly used for performance testing of the purification material for removing multiple AMCs.

Description

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Claims

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Application Information

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Owner TIANJIN UNIV
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