MEMS piezoelectric sensor for measuring curvature of micro-scale charging detonation wave front

The invention provides an MEMS piezoelectric sensor for measuring the curvature of a micro-scale charging detonation wave front. The MEMS piezoelectric sensor comprises a substrate, a lower output electrode and a lower bonding pad are sputtered on the substrate, and the lower output electrode and the lower bonding pad are connected through a lower wire to form a lower output layer; the lower output layer is spin-coated and cured to form a PVDF-TrFE thin film layer, silicone oil bath polarization is performed on the PVDF-TrFE thin film layer, a PVDF-TrFE sensitive element is obtained through ion etching, and a PVDF-TrFE piezoelectric layer is formed; an upper-layer output electrode and an upper-layer bonding pad are sputtered on the PVDF-TrFE piezoelectric layer, and the upper-layer outputelectrode and the upper-layer bonding pad are connected through an upper-layer wire to form an upper-layer output layer; the lower-layer output electrode and the upper-layer output electrode are arranged in an up-down axial alignment manner; the lower-layer bonding pad and the upper-layer bonding pad are connected through a lower-layer wire and an upper-layer wire and are vertically arranged; theupper output layer is coated with a protective layer; the sensor has the characteristics of small sensitive element size, high precision, multi-point acquisition and the like, and is suitable for measuring the curvature of the micro-scale charging detonation wave front under various test conditions.