Low-temperature-drift relative plane mounting differential integrated resonant accelerometer

A surface mount, accelerometer technology, applied in the direction of measurement of acceleration, speed/acceleration/shock measurement, measurement device, etc., can solve the problem of inability to completely eliminate errors, reduce the basic accuracy of accelerometers, and difficult to implement the pressure-bonded gold wire micro-assembly process Increase and other problems to achieve the effect of reducing thermal stress, reducing difficulty, and small residual stress in processing

Active Publication Date: 2020-11-20
XI AN JIAOTONG UNIV
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the two quartz tuning forks cannot guarantee complete consistency in the process, the differential arrangement cannot completely eliminate the error caused by the thermal stress on the accelerometer
[0004] The integrated micro-resonant accelerometer manufactures the spring-mass system and the micro-resonator separately, and integrates them using the micro-assemb

Method used

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Example Embodiment

[0026] The structure and working principle of the present invention will be described in detail below with reference to the accompanying drawings.

[0027] Refer to figure 1 , A low-temperature drift relatively flat-mounted differential integrated resonant accelerometer, comprising a metal base 1 and a first double-ended fixed quartz tuning fork 2-a, a second double-ended fixed quartz tuning fork 2-b, and a metal base 1 It includes a metal base 3, a first flexible hinge 4-a, a second flexible hinge 4-b, a mass 5 and a metal outer frame 6. The mass 5 passes through the first flexible hinge 4-a and the second flexible hinge 4-a. The hinge 4-b is connected to the metal base 3, and the left and right sides and the front side of the metal base 3 are connected to the metal outer frame 6; the first double-ended fixed quartz tuning fork 2-a and the second double-ended fixed quartz tuning fork 2 -b has the same structure, which is mounted on the front and back of the metal base 1, and is arr

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Abstract

The invention discloses a low-temperature-drift relative plane mounting differential integrated resonant accelerometer. The accelerometer comprises a metal base, a first double-end clamped quartz tuning fork and a second double-end clamped quartz tuning fork, the metal base comprises a metal base, a first flexible hinge, a second flexible hinge, a mass block and a metal outer frame, the mass blockis connected with the metal base through the first flexible hinge and the second flexible hinge, and the left side, the right side and the front side of the metal base are connected with the metal outer frame; the first double-end clamped quartz tuning fork and the second double-end clamped quartz tuning fork have the same structure, are attached to the front surface and the back surface of the metal base and are arranged in a differential mode; the first flexible hinge and the second flexible hinge have elastic characteristics in a sensitive direction SA. The accelerometer can reduce the influence of packaging stress and thermal stress on the output of the accelerometer, and has the advantages of high sensitivity, small temperature drift, high precision, small size and the like.

Description

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Claims

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Application Information

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Owner XI AN JIAOTONG UNIV
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