Device and method for testing performance of thermoelectric device

The invention relates to the field of thermoelectric device performance testing of semiconductor devices, in particular to a device and method for testing the performance of a thermoelectric device. The device comprises a test environment manufacturing system, a pluggable sample table, a temperature detection system, an electric signal detection system and automatic test software. The test environment manufacturing system creates a high-vacuum constant-temperature test environment for the to-be-tested sample; the plug-in sample table is used for fixing a device to be tested, realizes good thermal contact and electric contact with the device, and is mounted in the test environment manufacturing system; a probe of the temperature detection system is fixed on the plug-in sample table and the thermoelectric device and is used for monitoring the temperature change of the upper surface of the thermoelectric device; the electric signal detection system is connected with the thermoelectric device and the load and used for detecting related electric signals of the device. And the automatic test software is connected with the test environment manufacturing system, the temperature detection system and the electric signal detection system to realize automatic test of the device. According to the invention, a plurality of parameters of refrigeration and power generation performance of the thermoelectric device can be tested and calculated, performance test with higher precision and larger temperature zone is realized by adopting a vacuum and liquid nitrogen/thermoelectric composite cold and hot table constant temperature method, and the method has wide application prospect.