Substrate supporting unit and substrate treating apparatus and method

[0039]In this specification, if an element or layer is referred to as being “on”, “connected to”, or “coupled to” another element or layer, it can be directly on, directly connected, or directly coupled to the other element or layer, or intervening elements or layers may be present. In contrast, if an element is referred to as being “directly on”, “directly connected to”, or “directly coupled to” another element or layer, there are no (intended) intervening elements or layers (except possible environmental elements, such as air) present. Like numbers may refer to like elements in the specification. As used herein, the term “and / or” may include any and all combinations of one or more of the associated listed items.

[0040]Although the terms first, second, etc. may be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms may be used to disting