Physical quantity sensor, electronic device, and moving object

Modification Example 1

[0126]FIG. 6A is a partially enlarged view of a stopper portion of a physical quantity sensor according to a modification example 1.

[0127]In the same manner as the physical quantity sensors 1a and 1b described in the embodiments, in a physical quantity sensor 1c according to the modification example 1, the fixed electrode portions 38 and 39, and the movable electrode portions 36 and 37 which are provided on the movable weight 33 with the gap d1 interposed between the movable electrode portions and the fixed electrode portions 38 and 39 are provided. In addition, in the physical quantity sensor 1c according to the modification example 1, a stopper portion 160 is provided.

[0128]The physical quantity sensor 1c according to the modification example 1 has a structure of the stopper portion 160 which is different from those of the physical quantity sensors 1a and 1b described above.

[0129]In the description of the physical quantity sensor 1c according to the modification

Modification Example 2

[0136]FIG. 6B is a partially enlarged view of a stopper portion of a physical quantity sensor according to a modification example 2.

[0137]In the same manner as the physical quantity sensors 1a and 1b described in the embodiments, in a physical quantity sensor 1d according to the modification example 2, the fixed electrode portions 38 and 39, and the movable electrode portions 36 and 37 which are provided on the movable weight 33 with the gap d1 interposed between the movable electrode portions and the fixed electrode portions 38 and 39 are provided. In addition, in the physical quantity sensor 1d according to the modification example 2, a stopper portion 260 is provided.

[0138]The physical quantity sensor 1d according to the modification example 2 has a structure of the stopper portion 260 which is different from those of the physical quantity sensors 1a and 1b described above.

[0139]In the description of the physical quantity sensor 1d according to the modification

Modification Example 3

[0147]FIG. 6C is a partially enlarged view of a stopper portion of a physical quantity sensor according to a modification example 3.

[0148]In the same manner as the physical quantity sensors 1a and 1b described in the embodiments, in a physical quantity sensor 1e according to the modification example 3, the fixed electrode portions 38 and 39, and the movable electrode portions 36 and 37 which are provided on the movable weight 33 with the gap d1 interposed between the movable electrode portions and the fixed electrode portions 38 and 39 are provided. In addition, in the physical quantity sensor 1e according to the modification example 3, a stopper portion 360 is provided.

[0149]The physical quantity sensor 1e according to the modification example 3 has a structure of the stopper portion 360 which is different from those of the physical quantity sensors 1a and 1b described above.

[0150]In the description of the physical quantity sensor le according to the modification