Method for detecting a perturbation by hysteretic cycle using a nonlinear electromechanical resonator and device using the method
a nonlinear electromechanical resonator and hysteretic cycle technology, applied in the microsystem field, can solve the problems of occurrence of hysteresis phenomena, difficult to distinguish from measurement noise for very small masses, and small shifts
Active Publication Date: 2015-06-04
COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES +3
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Benefits of technology
This patent describes a method and device for measuring the mass of particles using a resonant mechanical element that vibrates at a specific frequency. The method involves exciting the resonant element with a source of energy to cause it to vibrate at a non-linear amplitude response. A measurement function is then generated by a perturbation that results from the vibration. The device includes a device for measuring the mass of particles using a resonant mechanical element. The technical effects of this patent are a more accurate and reliable method for measuring the mass of particles, which can be useful in various fields such as biological research and material science.
Problems solved by technology
The amplitude then exceeds a threshold value corresponding to the critical amplitude beyond which the vibration regime becomes non-linear, causing the occurrence of hysteresis phenomena.
However, this shift becomes very small and difficult to distinguish from measurement noise for very small masses.
However, under these conditions, the nano-resonators have a very strongly non-linear behaviour, a source of instabilities and of mixing of low and high frequency noise that are liable to degrade the reliability and precision of the measurements by frequency shifting as described in the article by V. Kaajakari, J. K. Koskinen, and T. Mattila, “Phase noise in capacitively coupled micromechanical oscillators,”IEEE transactions on ultrasonics ferroelectrics, and frequency drive, vol.
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Embodiment Construction
[0057]According to the present invention, the device comprises at least one resonant mechanical element, also dubbed a resonator, and an excitation source capable of bringing the said resonator into its non-linear operating domain by actuation with an appropriate amplitude, doing so whatever the dimensions and the transduction principle thereof.
[0058]This may for example be a device with piezoelectric, thermoelastic, magnetic, electrostatic or else optical actuation, and with piezoresistive, capacitive, piezoelectric, optical or magnetic detection, according to the known art.
[0059]Advantageously, the resonator can be a resonator of silicon beam type, of nanometric dimensions, for example a few μm long, a few 100 nm thick and wide, resonating at frequencies of the order of some ten MHz.
[0060]Advantageously the resonator can be a resonator whose non-linearity coefficient is able to be controlled so as to render it softening: the curve plotting the resonance frequency dependent amplitu...
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Abstract
A method is provided for detecting a perturbation with respect to an initial state, of a device comprising at least one resonant mechanical element exhibiting a physical parameter sensitive to a perturbation such that the said perturbation modifies the resonance frequency of the said resonant mechanical element. A device is provided for detecting a perturbation by hysteretic cycle comprising at least one electromechanical resonator with nonlinear behaviour and means for actuation and for detection of the reception signal via a transducer so as to analyse the response signal implementing the method. A mass sensor and a mass spectrometer using the device are also provided.
Description
CROSS-REFERENCE TO RELATED APPLICATION[0001]This application claims priority to foreign French patent application No. FR 1361972, filed on Dec. 3, 2013, the disclosure of which is incorporated by reference in its entirety.FIELD OF THE INVENTION[0002]The field of the invention is that of microsystems, dubbed MEMS for MicroElectroMechanical Systems and more precisely that of MEMS resonators, exhibiting a movable part that may be subjected to vibrations, for applications such as inertial sensors, pressure sensors, gas or mass sensors. By extension, it is possible to speak of MEMS / NEMS devices for devices that may exhibit some of their dimensions smaller than a micron, or indeed of the order of a nanometre.BACKGROUND[0003]Generally, a resonant sensor is characterized by a resonance frequency which depends mainly on the mass of the movable part of the sensor, the geometric parameters of the mechanical parts of the sensor and the physical parameters of the materials forming the various pa...
Claims
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IPC IPC(8): G01H13/00G01N29/36H01J49/26
CPCG01H13/00G01N2291/014G01N29/36H01J49/26H03H9/02H03H9/02259H03H9/2457B81B2203/0118H03H2007/006H03H2009/02267B81C99/0045B81B2201/0214B81B2201/0271G01H11/00
Inventor HENTZ, SEBASTIENBAGUET, SEBASTIENDUFOUR, REGISLAMARQUE, CLAUDE-HENRINGUYEN, VAN NGHI
Owner COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
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