A
semiconductor manufacturing apparatus includes: a
hot plate that heats an article to be processed; a
temperature control section that controls temperature of the
hot plate; a main body control section that controls the entirety of the apparatus based on a process
recipe; and an elevating mechanism that elevates the article to be processed above the
hot plate. The
semiconductor manufacturing apparatus further includes: a storage section that stores temperature data of the hot plate; an elevation control section that controls the elevating mechanism and sends elevation
timing data to the storage section; a management range calculation section that calculates a management range corresponding to parameter behavior in a transient gradient state based on the temperature data, process
recipe data, and the elevation
timing data; and an
abnormality detection section that detects apparatus
abnormality with the use of the management range calculated by the management range calculation section.