A delay phase calibration method for an improved alpha-beta scanning method comprises steps of: performing scanning imaging on an orthogonal grid grating sample by using an alpha-beta scanning method,namely, using sinusoidal signals with the operating frequency is f and initial phases being respectively 0 and [Pi]/2 to control a galvanometric vibrating mirror system to deflect the laser beam to scan; confirming the scanning image rotation angle [Theta] according to the relative positional relationship between the scanned image reconstructed using the target trajectory and the target image, and converting the angle value [Theta] into the radian value [Phi], wherein [Phi] is the size of the delay phase when the frequency is f; repeating the above measurement processes to obtain the delay phase size [Phi]k at different frequencies fk; and finally, according to the plurality of sets of measurement results, fitting the f-[Phi] function relationship, namely, the relationship between the scanning frequency and the phase delay function, and completing the delay phase calibration for the improved alpha-beta scanning method. The delay phase calibration method provided by the invention accurately determines the phase delay size and corrects the phase delay due to the inertia of the vibrating mirror system in advance.