The optical element array and an optical
waveguide array are optically connected on the substrate. The optical
waveguide array includes optical
waveguide channels which are the outermost optical waveguide channels on both sides of optical
waveguide array channels and each of which is provided with a mirror structure for light redirection. With the optical element array driven by a bias applied thereto, the optical
waveguide array is brought near the optical element array. The optical axes of the optical
waveguide array channels and the optical element array are aligned while monitoring optical signals outputted from the outermost optical waveguide channels on both sides of the optical waveguide array channels via the mirror structures for light redirection. The optical waveguide array is fixed to the substrate in such a position that the optical signals have a desired output value.