The invention provides a folding capacitive load
electrode structure, an electro-
optical modulator and a preparation method of the electro-
optical modulator. The
electrode structure comprises a main
signal electrode, a first main ground electrode, a second main ground electrode and a plurality of air bridges. The first main ground electrode, the main
signal electrode and the second main ground electrode form a G-S-G
coplanar waveguide transmission line. The plurality of air bridges are erected at the bending part of the main
signal electrode to connect the first main ground electrode with the second main ground electrode. The electro-
optical modulator comprises an electrode structure and a
lithium niobate
waveguide structure, and the
waveguide structure is arranged on the folding capacitive load electrode structure. The
lithium niobate
waveguide structure comprises a first waveguide and a second waveguide. Loading T-shaped electrodes are arranged on the two sides of the waveguides. A folding capacitive load electro-optical modulator is adopted, a parasitic
coupling slot line mode can be restrained to the maximum extent, the electro-optical modulator can efficiently work in a push-pull mode, and therefore
electric signal transmission loss and
return loss are reduced.