Optical microscopic imaging system and imaging method

[0023] figure 1 Schematic diagram of the optical microscopy imaging system. The 632.8nm laser light emitted by He-Ne laser 1 is divided into beam A and beam B after passing through half-wave plate 2 and polarization beam splitting prism 3, and after passing through beam expander collimator 4, one beam forms an illumination The plane light wave of sample 6 (transparent object) and passed through the microscope objective MO 1 (7) After forming an enlarged object light wave, another beam passes through the microscope objective lens MO 2 (8) After forming a divergent spherical reference light wave, the two beams of light are combined by the prism BS (ie, the beam combiner 9) and interfere, and are recorded by the CCD sensor 10 located in the image plane of the sample, and then sent to the computer 11 for processing , 5 in the figure represents the mirror. To eliminate MO 1 Introduced secondary phase distortion, MO 2 Should be with MO 1 It is exactly the same, and its position must ...